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INTRODUCTION 1

PART Ⅰ:INFLUENCE OF SURFACE MORPHOLOGY AND MICROSTRUCTURE ON OPTICAL RESPONSE 9

CHARACTERIZATION OF SURFACE ROUGHNESS 9

1.1 Introduction 9

1.2 What Surface Roughness Is 10

1.3 How Surface Roughness Affects Optical Measurements 14

1.4 How Surface Roughness and Scattering Are Measured 14

1.5 Characterization of Selected Surfaces 20

1.6 Future Directions 23

CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POLARIZATION-SENSITIVE OPTICAL TECHNIQUES 27

2.1 Introduction 27

2.2 Ellipsometry 29

Experimental Implementations of Ellipsometry 29

Analysis of Ellipsometry Data 32

2.3 Microstructural Determinations from Ellipsometry Data 34

Temperature Dependence of the Optical Properties of Silicon 34

Determination of the Optical Functions of Glasses Using SE 35

Spectroscopic Ellipsometry Studies of SiO2/Si 37

Spectroscopic Ellipsometry for Complicated Film Structures 38

Time-Resolved Ellipsometry 40

Single-Wavelength Real-Time Monitoring of Film Growth 41

Multiple-Wavelength Real-Time Monitoring of Film Growth 42

Infrared Ellipsometry Studies of Film Growth 44

THE COMPOSITION,STOICHIOMETRY,AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS 49

3.1 Introduction 49

3.2 Aspects of Raman Scattering 50

3.3 Ⅲ-Ⅴ Semiconductor Systems 51

3.4 Group Ⅳ Materials 56

3.5 Amorphous and Microcrystalline Semiconductors 59

Chalcogenide Glasses 60

Group Ⅳ Microcrystalline Semiconductors 63

3.6 Summary 66

DIAMOND AS AN OPTICAL MATERIAL 71

4.1 Introduction 71

4.2 Deposition Methods 72

4.3 Optical Properties of CVD Diamond 74

4.4 Defects in CVD Diamond 76

4.5 Polishing CVD Diamond 79

4.6 X-ray Window 80

4.7 Summary 81

PART Ⅱ:STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES 87

MULTILAYER OPTICAL COATINGS 87

5.1 Introduction 87

5.2 Single-Layer Optical Coatings 89

Optical Constants 90

Composition Measurement Techniques 91

5.3 Multilayer Optical Coatings 106

Compositional Analysis 107

Surface Analytical Techniques 108

Microstructural Analysis of Multilayer Optical Coatings 109

5.4 Stability of Multilayer Optical Coatings 111

5.5 Future Compositional and Microstructural Analytical Techniques 113

CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS 117

6.1 Introduction 117

6.2 Origins of Stress 119

6.3 Techniques for Modifying or Controlling Film Stress 124

Effect of Deposition Parameters 124

Effect of Ion-Assisted Deposition 127

Effect of Impurities 127

Effect of Post Deposition Annealing 128

6.4 Stress Measurement Techniques 130

Substrate Deformation 130

X-Ray Diffraction(XRD) 133

Raman Spectroscopy 134

6.5 Future Directions 136

SURFACE MODIFICATION OF OPTICAL MATERIALS 141

7.1 Introduction 141

7.2 Fundamental Processes 142

Ion-Solid Interactions 142

Defect Production,Rearrangement,and Retention 143

7.3 Ion Implantation of Some Optical Materials 145

Glasses and Amorphous Silica 145

α-Quartz(SiO2) 147

Halides 148

Sapphire(α-Al2O3) 149

LiNbO3 152

Preparation of Optical Components by Ion Implantation 153

LASER-INDUCED DAMAGE TO OPTICAL MATERIALS 157

8.1 Introduction 157

8.2 Laser Damage Definition and Statistics 158

Defining Damage 158

Collecting Damage Statistical Data 159

Types of Damage Probability Distributions 160

Identification of Pre-Damage Sites 160

Changing the Damage Threshold 161

8.3 In Situ Diagnostics 165

Photothermal Techniques 165

Particle Emission 168

8.4 Postmortem Diagnostics 170

Surface Charge State 170

Surface Phase and Structure Analysis 171

8.5 Future Directions 174

APPENDIX:TECHNIQUE SUMMARIES 181

1 Auger Electron Spectroscopy(AES) 181

2 Cathodoluminescence(CL) 182

3 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope(EELS) 183

4 Energy-Dispersive X-Ray Spectroscopy(EDS) 184

5 Fourier Transform Infrared Spectroscopy(FTIR) 185

6 Light Microscopy 186

7 Modulation Spectroscopy 187

8 Nuclear Reaction Analysis(NRA) 188

9 Optical Scatterometry 189

10 Photoluminescence(PL) 190

11 Photothermal Displacement Technique 191

12 Raman Spectroscopy 193

13 Rutherford Backscattering Spectrometry(RBS) 194

14 Scanning Electron Microscopy(SEM) 195

15 Scanning Transmission Electron Microscopy(STEM) 196

16 Scanning Tunneling Microscopy and Scanning Force Microscopy(STM and SFM) 197

17 Static Secondary Ion Mass Spectrometry(Static SIMS) 198

18 Surface Roughness:Measurement,Formation by Sputtering,Impact on Depth Profiling 199

19 Total Internal Reflection Microscopy 200

20 Transmission Electron Microscopy(TEM) 202

21 Variable-Angle Spectroscopic Ellipsometry(VASE) 203

22 X-Ray Diffraction(XRD) 204

23 X-Ray Fluorescence(XRF) 205

24 X-Ray Photoelectron Spectroscopy(XPS) 206

Index 207